JPH0313047U - - Google Patents
Info
- Publication number
- JPH0313047U JPH0313047U JP7163889U JP7163889U JPH0313047U JP H0313047 U JPH0313047 U JP H0313047U JP 7163889 U JP7163889 U JP 7163889U JP 7163889 U JP7163889 U JP 7163889U JP H0313047 U JPH0313047 U JP H0313047U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning unit
- processing chamber
- duct
- processing
- processing room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000012779 reinforcing material Substances 0.000 claims 1
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7163889U JPH0313047U (en]) | 1989-06-21 | 1989-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7163889U JPH0313047U (en]) | 1989-06-21 | 1989-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0313047U true JPH0313047U (en]) | 1991-02-08 |
Family
ID=31608846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7163889U Pending JPH0313047U (en]) | 1989-06-21 | 1989-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0313047U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53117581U (en]) * | 1978-02-20 | 1978-09-19 |
-
1989
- 1989-06-21 JP JP7163889U patent/JPH0313047U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53117581U (en]) * | 1978-02-20 | 1978-09-19 |